KTMM Seminar: MEMS Based Resonant "Double Ended Tuning Fork Force Sensor
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  • KTMM Seminar: MEMS Based Resonant "Double Ended Tuning Fork Force Sensor

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16 Kasım Çarşamba 13:30-14:40 saatleri arasında Teknopark Kompozit Araştırma Merkezinde ODTU Makina Mühendisliği Bölümünden Kıvanç Azgın,MEMS Based Resonant "Double Ended Tuning Fork" Force Sensorswith Implementations in Different Sensor Technologies başlıklı seminer verecektir.

Aşağıdaki doodle linki üzerinden seminere katılım durumunuzu 15 Kasım 2016 Salı  günü  saat 16:00'a kadar bildirmenizi rica ederim. Katılımcı sayısına göre araç ayarlanacaktır.


Sabancı Üniversitesi -Teknopark Gidiş 

Araç Hareket Saati : 13:00
Araç Hareket Alanı : Sunum Binası Önü 

Teknopark- Sabancı Üniversitesi 

Araç Hareket Saati : 15:00

Araç Hareket Alanı : KTMM Binası Önü

Satır içi resim 2

Speaker:         Kıvanç Azgın   

Title:                MEMS Based Resonant "Double Ended Tuning Fork" Force Sensorswith Implementations in Different Sensor Technologies

Date/Time:      Wednesday, November 16, 2016  13:30 – 14:40

Place:             Teknopark- KTMM



The dependence of the resonant frequencies of structures on internal stresses had found applications in vibrating cylinder pressure transducers as early as the mid 1960s. The use of resonant force sensors for precision weighing was first implemented at the macro scale . Recent developments in silicon micromachining techniques and brilliant yet simple design solutions for actuation and detection mechanisms led to micro-machined resonant force sensors, at first designed for miniature accelerometers. The Double Ended Tuning Fork (DETF) structure is proven to be a feasible design for various MEMS sensor applications.

The operational principle of the DETF force sensor is the same as that of a guitar string: when the tension is increased, the natural frequency increases dramatically. By virtue of their axial stiffness, DETF sensors remain essentially rigid when loaded. A feasibility study on the performance of DETFs as force sensors demonstrates that exceptional combinations of force resolution and range are available with optimized geometries. This  feature,  combined  with  excellent  stability,  minimal hysteresis, excellent resolution and an easily digitized output makes DETFs unique among force measuring instruments.

In this presentation, the integration of MEMS DETF force sensors with a variety of different MEMS sensor technologies, such as temperature sensors, pressure sensors, strain gauges/load cells, accelerometers and gyroscopes,  will be discussed. The discussion will also include the device design, fabrication methods and electronic control topology for sustained resonance frequency detection, together with relevant performance metrics.


Dr. Kıvanç Azgın received his BS degree in Mechanical Engineering and his Mechatronics Minor degree from Middle East Technical University (METU) in 2004 and 2005, respectively. He joined the METU MEMS-VLSI Group in 2004 and received his MS degree on "High Performance MEMS Gyroscopes" in Electrical and Electronics Engineering from METU in 2007. Subsequently, he started his Ph.D. studies in University of California, Irvine (UCI) and received his Ph.D. degree on "Very High Dynamic Range Resonant MEMS Load Cells For Micromechanical Test Frames" in Mechanical and Aerospace Engineering from UCI in 2012. He has been on faculty as an Assistant Professor at the Department of Mechanical Engineering, METU since 2012.

His research interests are in design, modeling, simulation, control, fabrication, and packaging of micromachined sensors and actuators, which include temperature, pressure, force and IR sensors, gyroscopes, accelerometers, magnetometers and micro-robotic systems for biological and aerospace applications. He serves as a reviewer for major journals in the MEMS field, such as Journal of Micro-Mechanics and Micro-Engineering (JMM), Journal of MicroElectroMechanical Systems (JMEMS) and IEEE Sensors.