M. Özkeskin; "Silicon&Polymeric MEMS...", Jan. 7, 15:40, L035
  • FENS
  • M. Özkeskin; "Silicon&Polymeric MEMS...", Jan. 7, 15:40, L035

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 Faculty of Engineering and Natural Sciences

 

FENS ME 551 SEMINARS

 

 

 

 

Silicon and Polymeric MEMS Structures for Biomedical Applications

 

 

 

 

 

Mert ÖZKESKİN

 

University of Michigan, Ann Arbor, USA

 

Department of Mechanical Engineering

 

 

 

Abstract

 

Recent progress in Microelectromechanical Systems (MEMS) techniques and increased range of materials enable fabrication of novel devices which draw attention to biomedical applications such as microcontact printing, single cell manipulation and microgripping. Conventional silicon, flexible PDMS and biocompatible SU-8 structures fabricated in our group are presented highlighting real world applications in biomedical industry

 

 

 

January 7, 2009, 15:40, FENS L035