Ş.Mutlu; "Microfabrication&Applications of Polymers...", April 3,10:40
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  • Ş.Mutlu; "Microfabrication&Applications of Polymers...", April 3,10:40

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Faculty of Engineering and Natural Sciences








Microfabrication and Applications of Polymers and Other Materials

Asst. Prof. Şenol Mutlu, Boğaziçi University




Research, development and production in classical MEMS and integrated circuits are complicated, expensive and time consuming. Facility establishment and maintenance costs are very prohibitive. An alternative method to fabricate sensors, actuators and electronics is to use polymers and stainless steel. Polymers and steel are cheap and their fabrication is simple.

In this presentation, I am going to talk about my research activities at Bogazici University Micro Electro Mechanical Systems (BUMEMS) laboratory to develop cheap and simple fabrication methods using insulating polymers such as SU-8 and parylene, conducting polymers such as PEDOT:PSS and semi-conducting polymers such as MEH-PPV and P3HT to achieve all polymer integrated microsystems. I am going to present the fabrication methods and test results of the fabricated polymer light emitting diodes and polymer transistors. Similarly, I am going to talk about how stainless steel can be an alternative to silicon micro electro mechanical devices. Stainless steel has almost equal and in certain aspects even better mechanical characteristics compared to silicon. Using simple, easy and cheap methods, steel can be micromachined to fabricate micro mirrors and inertial sensors.

Systems that are fabricated using these materials cannot compete with silicon microelectronics and classical MEMS technologies in terms of performance. However, because their prices can be very low and they can be fabricated very fast, they can find many applications in the areas of sensors, actuators, large-area printable electronics, display technologies and inertial sensors.

Short Bio: 

Şenol Mutlu received his B.S. degree in Electrical Engineering (Computers) from the University of Southern California, Los Angeles in 2000 and his M.S. and Ph.D. degrees in Electrical Engineering from the University of Michigan at Ann Arbor, in 2002 and 2005 respectively. He is currently an assistant professor at the Department of Electrical-Electronics Engineering at Boğaziçi University. His research interests include MEMS, circuits, display technologies, polymer sensors, polymer actuators, polymer electronics and steel transducers. He is the founder and director of Boğaziçi University Micro Electro Mechanical Systems (BUMEMS) laboratory.


April 3, 2009, 10:40, FENS G035