MAT Seminar on Friday II: Micro and Nano Biochips and Sensors
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  • MAT Seminar on Friday II: Micro and Nano Biochips and Sensors

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Micro and Nano Biochips and Sensors for Integrated Human Sensing System

Jin-Goo Park, Professor and  Director

Micro Biochip Center, Hanyang University, Ansan, 426-791, Korea

The need for fast diagnosis with small volume of bio samples drives the development of biochip and biosensors. Array, microfluidic chips or sensors have been widely used for antigen and antibody reaction based on either optical or electrochemical detection. These chips can be easily made at lab scale using silicon, glass and PDMS. In order to scale up the production of biochips, the plastic based process should be developed. Micro Biochip Center at Hanyang University is over $10M government supported center focused on industrialization of biochips for local companies and research institutes in Korea. Center has 6” full bio-MEMS fabrication facility with bio analytical lab. It could process silicon, glass, plastic and metal substrates. Also KRF (Korea Research Foundation) ERC (Engineering Research Center) of Human Sensing Systems works with the center to develop integrated human sensing system for early diagnosis and prognosis of cardiovascular diseases and cancers.

The combination between semiconductor and bio technology will provide novel path to high sensitivity and specificity, multiple sensing, miniatuarization and low cost bio detection. This could be possible by truly inter-disciplinary approach. Center accommodates inter-disciplinary research and also focuses on metal mold based on silicon fabrication technology. Various processes such as electropolishing, electrodeposition and imprinting  were developed to fabricate the metal mold in micron sizes. Also same technology was extended to fabricate micro and nano-well arrays to enhance the detection limit up to x100. Nano imprinting technology was also utilized to fabricate novel electrochemical sensors. In this seminar, research activities at MBC and ERC Center for Human Sensing Systems at Hanyang University will be overviewed.


Jin-Goo Park received B.S degree in metallurgy and materials engineering from Hanyang University, Korea in 1984 and the M.S. and Ph.D. in materials science and engineering from University of Arizona in 1988 and 1993, respectively. From 1992 to 1994, he was with Texas Instruments, Dallas, TX, where he was responsible for microcontamination control in semiconductor wet processing and DMD development. In 1994, he joined Hanyang University at Ansan, where he is now a professor in the Department of Materials Engineering as well as Directors of Micro Biochip Center and Nano-bio Electronic Materials and Processing Lab. (NEMPL). His research interests include wafer cleanings and chemical mechanical polishing as well as nano-bio MEMS. He has authored more than 500 technical publications/presentations in the area of wafer cleanings, CMP and nano-bio MEMS. He is now president of Korea CMPUGM ( and a founder of International Conference on Planarization/CMP Technology (ICPT) which is the largest CMP conference in the world. He is also a founder of Korea Surface Cleaning Users Group Meeting ( He may be reached at 82-31-400-5226 or by email