Seminar: Monolithic Silicon Nanowires: A Pathway to Next-Generation....31-01-2020
Speaker: Erdem Alaca, Koç University
Title: Monolithic Silicon Nanowires: A Pathway to Next-Generation Electromechanical Sensors
Date/Time: 4 February, 2020 / 11.40-12.30
Place: FENS G035
Abstract: With the focus placed on their potential of triggering significant miniaturization and evolution of sensor platforms, a series of technologies developed for the monolithic systems integration of Si nanowires are introduced in this talk. Such multiscale processes are regularly associated with challenges regarding alignment and registration, interface quality, assembly rate and contact formation. As these factors constitute a formidable barrier to the efficient utilization of nanoscale building blocks as electromechanical transducers, the technologies discussed here are geared towards eliminating or bypassing such obstacles. Based on these technologies, two pilot studies are conducted with piezoresistive Si NWs. The first one is a quasistatic application highlighting integration with conventional silicon-on-insulator (SOI) microelectromechanical systems (MEMS). The second study involves a dynamic-mode application with VHF operation demonstrating a new approach to nanomechanical coupling. The talk is concluded with a discussion on related metrology issues.
Bio: B. Erdem Alaca received his B.S. degree in mechanical engineering from Boğaziçi University in 1997, and his M.S. and Ph.D. degrees in mechanical engineering from the University of Illinois at Urbana–Champaign in 1999 and 2003, respectively. Upon joining Koç University in 2004, he established Mechanical Characterization Laboratory and Microfabrication Facility. His research interests include mechanical behavior at the small scale, micro and nanofabrication technologies and precision instruments based on nanoelectromechanical devices. Prof. Alaca is a member of the Turkish National Committee on Theoretical and Applied Mechanics and the Institute of Electrical and Electronics Engineers (IEEE). He was a recipient of the 2009 Distinguished Young Scientist Award from the Turkish Academy of Sciences and 2017 Elginkan Foundation Technology Award.
Contact: Selim Balcısoy