The list of the compressed gases used in MEL cleanroom is shown in Table 11.2.

Table 11.2 List of compressed gases used in MEL cleanroom

Name

Formula

Hazard Statement

Argon

Ar

May cause drowsiness or dizziness

Nitrogen

N2

May cause respiratory irritation, drowsiness or dizziness

Oxygen

O2

May cause or intensify fire; oxidiser, may cause respiratory irritation

Sulfur Hexafluoride

SF6

May cause drowsiness or dizziness

Tetrafluoromethane

CHF4

May cause drowsiness or dizziness

Notes:

  • Inert and non-flammable gases, although non-toxic, can cause asphyxiation (suffocation) by displacing oxygen.
  • Pyrophoric means spontaneously combustible in contact with air.
  • Any gas not labelled properly should be considered toxic.
  • Loss of nitrogen to turbo-pumps or cryo-pumps may result in pump in the buildup of toxic waste. Under no circumstances should non-MEL staff attempt any repair or restorative action on vacuum pumps associated with MEL equipment.
  • Safety data sheet (SDS) are available for review at any time. Please contact LSS for any safety information.

References and sources for information from the relevant websites and documentation of different universities, NGOs and government agencies used in the preparation of this website are provided at references.

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