The list of the compressed gases used in MEL cleanroom is shown in Table 11.2.
Table 11.2 List of compressed gases used in MEL cleanroom | ||
Name | Formula | Hazard Statement |
Argon | Ar | May cause drowsiness or dizziness |
Nitrogen | N2 | May cause respiratory irritation, drowsiness or dizziness |
Oxygen | O2 | May cause or intensify fire; oxidiser, may cause respiratory irritation |
Sulfur Hexafluoride | SF6 | May cause drowsiness or dizziness |
Tetrafluoromethane | CHF4 | May cause drowsiness or dizziness |
Notes:
- Inert and non-flammable gases, although non-toxic, can cause asphyxiation (suffocation) by displacing oxygen.
- Pyrophoric means spontaneously combustible in contact with air.
- Any gas not labelled properly should be considered toxic.
- Loss of nitrogen to turbo-pumps or cryo-pumps may result in pump in the buildup of toxic waste. Under no circumstances should non-MEL staff attempt any repair or restorative action on vacuum pumps associated with MEL equipment.
- Safety data sheet (SDS) are available for review at any time. Please contact LSS for any safety information.