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Working With Equipment

  • Please schedule your runs in advance when possible. Do not sign up for more time than you think you may need.
  • Comply with your schedule. If you do not log into the equipment within 15 minutes after your time begins, you will lose your time and other users may use the equipment.
  • Remove tooling (boats, sample holders, etc.) from systems and clean-up particles from process chamber. Note any anomalies to the staff and next user.

NOTE: To establish a safe use of equipment, all approved MEL users are required in the cleanroom during the operation of equipment. Exceptions to this rule are furnace tubes because a deposition may take extended time periods.

References and sources for information from the relevant websites and documentation of different universities, NGOs and government agencies used in the preparation of this website are provided at references.

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