ME409 "Foundations of Microsystems"
2007-2008 Güz döneminde açılacak ME 409 dersi öğretim üyesi Ali Koşar tarafından aşağıdaki içerikle verilecektir.
ME 409 Foundations of Microsystems
Fall
2007
Instructor: Dr. Ali Koşar
Office: FENS 1077
E-mail: kosara@sabanciuniv.edu
Phone: (216) 483-9621
Office hours: Monday-Friday 10.00-17.00 (subject to availability), e-mail or
phone.
Text: Microsystems Design, Stephen D.
Senturia, 2001, ISBN 0792372468
and lecture notes.
Prerequisites: Senior or First Year Graduate
Standing in Engineering.
Grading: Homework 20%, Midterm 30%, Final
Exam 30%, Term Project 20%
Course Description: ME 409 (a
three credit course) is designed for upper class undergraduate and entry-level
graduate students to give an introduction to microsystems technology. The following topics will be covered: 1- Overview on microsystems, 2-Fabrication of microsystems,
3- Working principles of microsystems, 4- Analysis and modeling of
microsystems, 5-Materials for microsystems, 6- Microsystem packaging.
Goals:
· To
give a broad introduction to microsystems technology
· To
give students an opportunity to study the current literature
- To provide understanding in
theory and analysis on microsystems
- To help students gaining
insight into microsystems design
Reference Books:
· MEMS
and Microsystems: Design and Manufacture, Tai-Ran Hsu, Mc Graw Hill , 2002,
ISBN 0-07-239391-2
- Fundamentals of Microfabrication, Marc
Madou, CRC Press, NY, 1997.
- Nadim Maluf, An Introduction to
Microelectromechanical Systems Engineering, Artech House, 2000.
Journals:
- J. Microelectromechanical Systems
(IEEE/ASME)
- Sensors and Actuators (Elsevier)
- J. Micromechanics and Microengineering
(IOP)
Co-operation on
coursework:
It is encouraged to discuss
with classmates, use texts, library materials, and other sources while doing
any assignment. If a solution to a problem is found in the literature, students
must provide correct citations to that literature. For the homework
assignments, every student is expected to have worked through his/her own analysis and to have written up his/her own work
for submission. Under no circumstances is it permitted to present another
student's work as one’s own. For term projects, a single report from each team
is to be prepared.
Term
Project:
Each team (consisting of 2 students) will
select one topic for the project related to this course. The project will be either a literature
review about the topic or a design project related to the topic. In the design type project technical drawing
and analysis should be included and no fabrication is required, whereas papers
related to the topic should be discussed and major theory and analysis, results
and discussions should be presented. The
title of the topic and abstract (250-300 words) should be submitted for
instructor’s approval prior to working on the project. This will be due early November. The project report should be approximately
10-12 pages long and will be due to the first day of project presentations.
The written report must be in the
style of a review journal article (like a Journal of Microelectromechanical
Systems article) having the typical format as follows: Title, Author’s Name and
Affiliation, Abstract, Objectives, Theory and Analysis, Technical Description,
Results and Discussion and References. Plagiarism will be severely punished and result in a “zero” grade for
written portion of the term project. Project Presentations will be given to the rest of the class in the last
week of classes at regular class hours.
Course Outline (Subject to change)
|
Week/ Dates
|
Subjects
|
Text Reference
|
|
1 (24-29.9)
|
Overview
of MEMS and Microsystems
|
Ch. 1+
Lecture notes
|
|
2-4 (1-5.10, 8-11.10, 15-19.10)
|
Microfabrication
Fundamentals
|
Ch. 3+Lecture
notes
|
|
5-6 (22-26.10,
30.10-2.11)
|
Working Principles of Microsystems
|
Ch. 18-22+Lecture notes
|
|
7 (5-9.11)
|
Midterm
Exam
|
|
|
7-8 (5-9.11, 19-23.11)
|
Engineering
Mechanics for Microsystem Design
|
Ch. 5-10+Lecture
notes
|
|
9-10 (26-30.11, 3-7.12)
|
Thermofluid Engineering and Microsystem
Design
|
Ch. 11-13+Lecture notes
|
|
11 (10-14.12)
|
Scaling Laws
|
Lecture notes
|
|
12-13 (17-19.12, 24-28.12)
|
Materials
for MEMS and Microsystems
|
Lecture
notes
|
|
14 (31.12, 2-3.1)
|
Microsystem
Packaging
|
|
|
15 (7-11.1)
|
Project
presentations
|
|