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Cleanroom Conditions

Clean Room Safety

In general, the classifications of cleanrooms are done depending on the number and size of particles permitted per volume of air. Numbers like "class 100" or "class 1000" denote the number of particles of size 0.5 mm or larger permitted per cubic foot of air. 

The classifications of cleanrooms are done with two standards; (1) US Federal Standard 209E and (2) the newer standard TC 209 from the International Standards Organization. The number of particles found in the laboratory’s air is a basis for these two standards used in classification of cleanrooms. As an example; Sabancı University lab has been classified as a class 10 cleanroom because there are less than 10 particles per cubic foot. Table 11.1 relates FS to ISO classifications:

Table11.1 ISO 14644-1 Cleanroom Standards 
Classmaximum particles/m3FED STD 209E
equivalent
>=0.1 µm>=0.2 µm>=0.3 µm>=0.5 µm>=1 µm>=5 µm
ISO 1102     
ISO 210024104   
ISO 31,000237102358 Class 1
ISO 410,0002,3701,02035283 Class 10
ISO 5100,00023,70010,2003,52083229Class 100
ISO 61,000,000237,000102,00035,2008,320293Class 1,000
ISO 7   352,00083,2002,930Class 10,000
ISO 8   3,520,000832,00029,300Class 100,000
ISO 9   35,200,0008,320,000293,000Room Air

* Table adopted from Brigham Young University, Department of Electrical and Computer Engineering, Cleanroom Classification (Reference 11.1).

In the K 10,000 two situations exist:

  • Mo - Fri, 07.00 a.m.. - 06.00 p.m. air extraction high
  • Mo - Fri, 06.00 p.m.. - 07.00 a.m., and on Saturday, Sunday and on holidays: air extraction low

Air extraction high: conditions meet safety and minimum contamination level requirements.

Air extraction low: conditions meet safety requirements; minimum contamination level not guaranteed.

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